Oxford University Press
Plasma Etching
Subjects: Maths & Science,
Plasma physics
ISBN13: 9780198562870
Published: 01 May 1998
Format - Hardback
Usually ready in 7-10 business days.
Regular price
A$396.34
Sale price
A$396.34
Regular price
A$408.60
Plasma Etching
Regular price
A$396.34
Sale price
A$396.34
Regular price
A$408.60
Product description
Shipping & Return
The focus of this book is the remarkable advances in understanding of low pressure RF (radio frequency) glow discharges. A basic analytical theory and plasma physics are explained. Plasma diagnostics are also covered before the practicalities of etcher use are explored.
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We want you to be 100% satisfied with your purchase. Items can be returned or exchanged within 30 days of delivery.