Particle Control for Semiconductor Manufacturing
Taylor & Francis

Particle Control for Semiconductor Manufacturing

Edition: 1st Edition
Subjects: Engineering, Technology, engineering, agriculture
ISBN13: 9780824782429
Published: 26 Jan 1990

Format - Hardback
By R.P. Donovan

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Particle Control for Semiconductor Manufacturing

A$504.00
A$504.00 A$630.00
Product description

There is something Alice-in-Wonderlandish about powerful and vital computer systems being shut down by a microscopic mote that a hay-feverist wouldn't sneeze at, but as computer chips get smaller, smaller and smaller particles on their surface have a larger and larger effect on their performance. In

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