Taylor & Francis

Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology - Hardback

Edition: 1st Edition
Subjects: Engineering, Environmental science, engineering & technology
ISBN13: 9780824799519
Published: 25 Jun 1998

Format - Hardback
By Saburo Nonogaki

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A$420.00
A$420.00 A$525.00
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Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology - Hardback

A$420.00
A$420.00 A$525.00
Product description

"Explores the science and technology of lithographic processes and resist materials and summarizes the most recent innovations in semiconductor manufacturing. Considers future trends in lithography and resist material technology. Reviews the interaction of light, electron beams, and X-rays with resist materials."

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