{"product_id":"handbook-of-silicon-semiconductor-metrology-paperback-softback","title":"Handbook of Silicon Semiconductor Metrology - Paperback \/ softback","description":"\u003cp\u003eContaining more than 300 equations and nearly 500 drawings, photographs, and micrographs,\u003cbr\u003ethis reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay, acoustic film thickness, dopant dose, junction depth, and electrical measurements; particle and defect detection; and flatness following chemical mechanical polishing. Providing examples of well-developed metrology capability, the book focuses on metrology for lithography, transistor, capacitor, and on-chip interconnect process technologies.\u003c\/p\u003e","brand":"Taylor \u0026 Francis","offers":[{"title":"Default Title","offer_id":45600044908782,"sku":"9780367397166","price":104.8,"currency_code":"AUD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0630\/9612\/7726\/files\/9780367397166.jpg?v=1721462164","url":"https:\/\/bookland.com.au\/products\/handbook-of-silicon-semiconductor-metrology-paperback-softback","provider":"Book Land AU","version":"1.0","type":"link"}